Novel of MEMS Resonant Gyroscope using DETF as Sensing Structure

Uvi Desi Fatmawati, Fan Shang Chun, Zhanshe Guo

Abstract


Nowadays MEMS product is widely used in all fields such as industry, automation, aerospace, marine, etc. With advances fabrication and lowering cost, MEMS product is very useful and its simple design enabling the user use it easily. This research introduced a new design of MEMS resonant gyroscope using DETF as sensing structure. The decoupled DETF has been designed to be able to produce the natural frequency of 80 KHz, while the whole gyroscope structures generate natural frequency of 3511,8 Hz. Above condition is done to avoid force miss detection in sense mode and drive mode, which has become the biggest problem in gyroscope design. The result showed that the new design of MEMS Resonant Gyroscope is feasible.

Keywords


MEMS gyroscope; Resonant sensor; DETF; New design

References


H. Hyvönen, Thermomechanical and Mechanical Characterization of a 3-Axial MEMS Gyroscope, Master Degree Thesis in School of Electrical Engineering Aalto University, Helsinky. (2011)

W. Yingying, F. Shangchun., R. Jie, and G. Zhanshe, A Silicon microelectromechanical resonant gyroscope, 6th International Symposium on Instrumentation and Control Technology : Sensors, Automatic Measurement, Control, and Computer Simulation. 6358 (2006)

A.A. Seshia, R.T. Howe and S. Montague, An Integrated Microelectromechanical Resonant Output Gyroscope, The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas. (2002) 722 – 726.

Y.L. Zhu, S.R. Wang and A.P. Qiu, Design and Simulation of a DETF for Use in a Resonant Gyroscope, J. Key Engineering Materials. 295-296 (2005) 113-118.

Wang L. Resonant Silicon Micromachined Gyroscope Design and Simulation. Beihang University Master Degree Thesis. (2010)


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